MOS sensor and drive method thereof

ABSTRACT

To provide a drive method for finding out an optimum storage period quickly. To provide a drive method for finding out an optimum storage period quickly. In the method for driving the MOS sensor having a plurality of pixels, after all the plurality of pixels are simultaneously reset, signals are then sequentially outputted from said plurality of pixels. The period from the reset time to the time just before said plurality of pixels output saturated signals is termed as the storage period.

This application is Divisional of U.S. application Ser. No. 09/864,280now U.S. Pat. No. 7,224,391 filed May 25, 2001.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a MOS sensor and its drive method. Morespecifically, the invention relates to a technique for determining theoptimum storage period in a MOS area sensor.

2. Related Art

In recent years, information devices such as the personal computers havespread so widely as to enhance the desire to read various informationsas electronic informations in the personal computers. Therefore, thedigital still cameras have been highly noted in place of the silver saltcameras of the prior art, and the scanners have also been highly notedas the means for reading prints from paper.

In the digital still cameras, there has been used the area sensor inwhich the pixels of an image sensor unit are two-dimensionally arrayed.In the scanners or copying machines, there has been used the line sensorin which the pixels of the image sensor unit is linearly arrayed.

In these image reading devices, the CCD sensor is mainly used as theimage sensor. In the CCD sensor, the photodiode of each pixel performsthe photoelectric conversion, and its signal is read by using the CCD.In the recent years, however, the MOS sensor made of asingle-crystalline silicon substrate has shown the symptom of partialspreading because a peripheral circuit can be built in, it can be madeinto one chip, it is suitable for the real time signal processing, andits power consumption is low, and so on. These spreading situations ofthe MOS sensor have been described on pp. 119 of “Nikkei Electronics”,Jul. 14, 1997 (Revived MOS Solid Image Pickup Element—Spreading ItsApplications with Arms of Low Power Consumption). At the research level,however, there has also been developed the MOS sensor which is made ofTFTs over a glass substrate. In these MOS sensors, the signals ofindividual pixels are read out by the photoelectric conversions throughthe photodiodes of each pixel and by the switches formed of the MOStransistors.

First of all, therefore, here will be schematically described the MOSsensor, followed by the CCD sensor.

As the pixel construction of the MOS sensor, there have been developed avariety of types. These types can be coarsely classified into two kinds:a passive sensor and an active sensor. The passive sensor is a sensorhaving no signal amplifying element on each pixel, whereas the activesensor is a sensor having a signal amplifying element on each pixel. Theactive sensor has a merit of a higher strength against noises than thepassive sensor because the signal is amplified in each pixel.

FIG. 3 shows a circuit example of a pixel in the passive sensor. Thepixel 305 is constructed to include a switching transistor 301 and aphotodiode 304. This photodiode 304 is connected with a power referenceline 306 and the source terminal of the switching transistor 301. Theswitching transistor 301 is connected at its gate terminal with a gatesignal line 302 and at its drain terminal with a signal output line 303.The photodiode 304 performs the photoelectric conversion. Specifically,the photodiode 304 generates an electric charge according to an incidentlight and stores it therein. By controlling the gate signal line 302,moreover, the switching transistor 301 is turned conductive so that theelectric charge of the photodiode 304 is read out via the signal outputline 303.

In the passive sensor, the switching transistor 301 is turned conductiveto read the charge of the photodiode 304 as the signal. Moreover, thephotodiode 304 is connected with the source terminal of the switchingtransistor 301. When the signal is read, therefore, the photodiode 304changes its state (e.g., the charge or the potential). In other words,the signal of the photodiode 304 cannot be read without changing itsstate. Therefore, it can be said that the reading by the passive sensoris a destructive one.

Also, it is ordinary that the signal of the pixel is read and outputtedfor each row or pixel. On the other hand, the storage period has to beequal for all pixels. It is, therefore, necessary to perform theresetting for each row or pixel. As a result, the timings for theresetting and the signal outputting are different for the individualrows (or pixels). Therefore, the storage periods are equal for all rows,but the storage timings are not. With these restrictions, however, thesignals of the individual rows (or pixels) can be randomly read out onprinciple. Therefore, this reading method is called the “randomreset/read method”.

There are a variety of types of constructions of the pixels of theactive sensor. On pp. 17 (CMOS Image Sensors, Electronic Camera On aChip) of IEDM95 or on pp. 201 (CMOS Image Sensors—Recent Advances andDevice Scaling Considerations) of IEDM97, there are introduced the pixelconstructions and actions of photo diode type and photo gate type. Onpp. 180 (A ¼ Inch 330 k Square Pixel Progressive Scan CMOS Active PixelImage Sensor) of ISSCC97, the pixel construction is classified from theviewpoint of a pixel selecting method. Specifically, there are describedthe case of using transistors and the case of using capacitors. Thus,there are various numbers of transistors which construct one pixel. InJIEC Seminar: Survey of Development of CMOS Cameras of Feb. 20, 1998,there has been widely introduced the general view of the CMOS sensors,and there has also been described the logarithmic conversion type foroutputting logarithmic signals of the optical intensity by connectingthe gate electrodes and the drain electrodes of resetting transistors.

The pixel construction of the active sensor, as most frequently adopted,is of the type in which one pixel 408 is composed of three N-channeltransistors and one photodiode, as shown in FIG. 4. A photodiode 404 isconnected at its P-channel terminal with a power reference line 412 andat its N-channel terminal with the gate terminal of an amplifyingtransistor 406. The drain terminal and the source terminal of theamplifying transistor 406 are connected with a power line 409 and thedrain terminal of a switching transistor 401. This switching transistor401 is connected at its gate terminal with a gate signal line 402 and atits source terminal with a signal output line 403. A resettingtransistor 407 is connected at its gate terminal with a reset signalline 405. The source terminal and the drain terminal of the resettingtransistor 407 are connected with the power line 409 and the gateterminal of the amplifying transistor 406.

In the case of the area sensor, one signal output line 403 is connectedwith not only one pixel 408 but also many pixels. However, only onebiasing transistor 411 is arranged for one signal output line 403. Thebiasing transistor 411 is connected at its gate terminal with a biassignal line 410. The source terminal and the drain terminal of thebiasing transistor 411 are connected with the signal output line 403 anda bias side power line 413.

Here will be described the basic actions of the pixel 408.

At first, the resetting transistor 407 is turned conductive. Thephotodiode 404 is electrically connected at its P-channel terminal withthe power reference line 412 and at its N-channel terminal with thepower line 409. The power reference line 412 has a potential at thereference potential of 0 V, and the power line 409 has a potential at apower potential Vdd. Therefore, a reverse bias voltage is applied to thephotodiode 404. From now on, the action, in which the potential of theN-channel terminal of the photodiode 404 is charged to the potential ofthe power line 409, will be called the “reset”. After this, theresetting transistor 407 is turned nonconductive. Then, an electriccharge is generated by the photoelectric conversion when the photodiode404 is irradiated with light. As the time elapses, therefore, thepotential, as charged to the potential of the power line 409, at theN-channel terminal of the photodiode 404 is gradually lowered due to thecharge generated by the light. After a lapse of a predetermined time,moreover, the switching transistor 401 is turned conductive. Then, thesignal is outputted through the amplifying transistor 406 to the signaloutput line 403.

When the signal is outputted, however, the potential is applied to thebias signal line 410 so that the electric current flows in the biasingtransistor 411. Therefore, the amplifying transistor 406 and the biasingtransistor 411 act as the so-called “source-follower circuit”.

In FIG. 4, the wiring line connecting the P-channel terminal of thephotodiode 404, i.e., the power reference line 412 may be called the“photoelectric conversion element side power line”. The potential ofthis photoelectric conversion element side power line changes with thedirection of the photodiode 404. In FIG. 4, the photoelectric conversionelement side power line is connected with the P-channel terminal of thephotodiode 404 and has the reference potential of 0 V. In FIG. 4,therefore, the photoelectric conversion element side power line iscalled the “power reference line”.

Likewise, in FIG. 4, the wiring line connecting the resetting transistor407, i.e., the power line 409 may be called the “reset side power line”.The potential of this reset side power line changes with the directionof the photodiode 404. In FIG. 4, the reset side power line is connectedthrough the resetting transistor 407 with the N-channel terminal of thephotodiode 404 so that it has the power potential Vdd. In FIG. 4,therefore, the reset side power line is called the “power line”.

To reset the photodiode 404 is to apply the reverse bias voltage to thephotodiode 404. According to the direction of the photodiode 404,therefore, there changes the magnitude relation of the potential betweenthe photoelectric conversion element side power line and the reset sidepower line.

Next, FIG. 5 shows an example of the most basic source follower circuit.In FIG. 5, there is shown the case in which the N-channel transistor isused. The source follower circuit could be constructed by using theP-channel transistor. An amplification side power line 503 is fed withthe power potential Vdd. A bias side power line 504 is fed with thereference potential of 0 V. An amplifying transistor 501 is connected atits drain terminal with the amplification side power line 503 and at itssource terminal with the drain terminal of a biasing transistor 502. Thesource terminal of the biasing transistor 502 is connected with the biasside power line 504. The biasing transistor 502 is fed at its gateterminal with a bias potential Vb. Therefore, a bias current Ib flowsinto the biasing transistor 502. The biasing transistor 502 basicallyacts as a constant current source. The gate terminal of the amplifyingtransistor 501 acts as an input terminal 506. Therefore, the amplifyingtransistor 501 is fed at its gate terminal with an input potential Vin.The source terminal of the amplifying transistor 501 acts as an outputterminal 507. Therefore, the source terminal of the amplifyingtransistor 501 takes an output potential Vout. The input/output relationof the source follower circuit at this time is Vout=Vin−Vb.

Comparing FIG. 4 and FIG. 5, the amplifying transistor 406 correspondsto the amplifying transistor 501. The biasing transistor 411 correspondsto the biasing transistor 502. It can be thought that the switchingtransistor 401 is omitted from FIG. 5, because the conductive state isimagined. The potential at the N-channel terminal of the photodiode 404corresponds to the input potential Vin (i.e., the gate potential of theamplifying transistor 501 or the potential at the input terminal 506).The potential at the signal output line 403 corresponds to the outputpotential Vout (i.e., the source potential of the amplifying transistor501 or the potential at the output terminal 507). The power line 409corresponds to the amplification side power line 503.

In FIG. 4, therefore, a relation of Vout=Vpd−Vb is deduced by settingthe potential at the N-channel terminal of the photodiode 404 to Vpd, bysetting the potential of the bias signal line 410, i.e., the biaspotential to Vb, by setting the potential of the signal output line 403to Vout and by setting the potentials of the power reference line 412and the biasing power line 413 to 0 V. When the potential Vpd at theN-channel terminal of the photodiode 404 changes, therefore, thepotential Vout also changes so that the change in the potential Vpd canbe read as the signal to read the optical intensity.

Next, the signal timing chart at the pixel 409 is illustrated in FIG. 6.At first, the resetting transistor 407 is turned conductive bycontrolling the reset signal line 405. Then, the potential at theN-channel terminal of the photodiode 404 is charged up to the powerpotential Vdd or the potential of the power line 409. In short, thepixel is reset. Then, the reset signal line 405 is controlled to turnthe resetting transistor 407 nonconductive. After this, the photodiode404 generates the electric charges according to an optical intensity ifirradiated with light. Therefore, the electric charge stored by theresetting action is gradually released. In other words, the potential atthe N-channel terminal of the photodiode 404 becomes lower. Where a darklight is irradiating, the discharging rate is also low so that thepotential at the N-channel terminal of the photodiode 404 does notbecome so low. Where a bright light is irradiating, the discharging rateis so high that the potential at the N-channel terminal of thephotodiode 404 drops at a high changing rate.

At an instant of time, the switching transistor 401 is turned conductiveto read the potential at the N-channel terminal of the photodiode 404 asthe signal. This signal is proportional to the intensity of the light.Then, similar actions are repeated by turning the resetting transistor407 conductive again to reset the photodiode 404.

Where a very bright light is irradiating, however, the electric chargeof the photodiode 404 is released so much that the potential at theN-channel terminal of the photodiode 404 becomes to a very low level.However, the potential at the N-channel terminal of the photodiode 404does not become lower than the potential at the P-channel terminal ofthe photodiode 404, i.e., the potential of the power reference line 412.When an intense light irradiates, therefore, the potential at theN-channel terminal of the photodiode 404 becomes low. When thispotential becomes lower and lower down to the potential of the powerreference line 412, it does not change any more. This situation iscalled the “saturation”. In this saturation, the potential at theN-channel terminal of the photodiode 404 does not change so that thecorrect signal, i.e., the signal according to the optical intensitycannot be outputted. Within the normal action range, therefore, it isnecessary to prevent the photodiode 404 from being saturated.

Here, the period from the time when the pixel is reset to the time whenthe signal is outputted is called the “storage period”. In short, thestorage period is the time period, for which the signal is being storedby irradiating the light receiving unit of an image sensor with thelight, and is called the “storage term” or the “exposure period”. Forthe storage period, the photodiode 404 is storing the electric chargegenerated by the light. For the different storage periods, therefore,the totals of the electric charges, as generated with the light, aredifferent even for an identical light intensity, so that the signalvalues become different. For example, a bright light causes a saturationfor a short storage period. Even a dark light will cause a saturation ifthe storage period is long. In short, the signal is determined by theproduct of the optical intensity and the storage period.

FIG. 6 illustrates the case of one pixel. Here will be described thecase in which the pixels are arrayed in a matrix shape. In this case,the signals of the pixels are read out as outputs for each row. On theother hand, the storage period has to be equal for all pixels.Therefore, the resetting has to be done for each row. As a result, thetiming for the resetting and the timing for outputting the signals aredifferent for the individual rows. Therefore, the storage period isequal for the pixels of all rows, but the storage times are different.With these restrictions, however, the signals of the individual rows canbe read out at random. Therefore, the reading method of this case is therandom reset/read method.

In the pixel 408, on the other hand, the switching transistor 401 isturned conductive to read the signal from the photodiode 404. However,the N-channel terminal of the photodiode 404 is connected with the gateterminal of the amplifying transistor 406. Even if the signal is read,therefore, no change occurs in the state (e.g., the charge or potential)of the photodiode 404. In other words, the signal of the photodiode 404can be read many times without changing the state of the photodiode 404.Therefore, it can be said that the reading in the active sensor is anon-destructive reading.

Here will be described the transistors in the pixel 408. On thepolarity, the transistors are frequently of the N-channel type. It israre, but the resetting transistor is of the P-channel type (as shouldbe referred to FIG. 11 of pp. 9 of JIEC Seminar: Survey of Developmentof CMOS Cameras, Feb. 20, 1998). On the other hand, the amplifyingtransistor and the selecting transistor, which are both N-channel types,are frequently arranged, as shown in FIG. 4, by connecting the powerline 409 and the amplifying transistor 406, by connecting the amplifyingtransistor 406 and the switching transistor 401, and by connecting theswitching transistor 401 and the signal output line 403. The arrangementis rarely effected by using both the transistors of the N-channel typeto connect the power line 409 and the switching transistor 401, theswitching transistor 401 and the amplifying transistor 406, and theamplifying transistor 406 and the signal output line 403 (on pp. 180 ofISSCC97: A ¼ Inch 330 k Square Pixel Progressive Scan CMOS Active PixelImage Sensor).

The MOS sensor has been described hereinbefore. Here will be describedCCD sensor.

At first, the CCD sensor can be coarsely classified into two inaccordance with the signal transfer method in the CCD. One is the frametransfer type CCD, and the other is the interline transfer type CCD.Basically, both the CCDs act in the bucket relay method. Specifically, asignal is transferred to an adjoining pixel, and another signal isreceived from another adjoining pixel. These actions are repeated. Theseactions are made for all pixels and are repeated to transfer the wholesignals. Only a signal of a certain pixel cannot be read by itself butis transferred to an adjoining pixel at all times.

The frame transfer CCD shares the light receiving unit and the signaltransferring unit. In the actions, the light receiving unit performs thephotoelectric conversion to store the electric charge and transfers thesignal to an adjoining light receiving unit (i.e., transfers a signal toan adjoining pixel and receives another signal from another adjoiningpixel). In this method, an electric charge is mixed, if generated by anew light while the signal is being transferred, into the signal beingtransferred. This makes it necessary to shut the light while the signalbeing transferred. Therefore, a mechanical shutter is used to shut thelight.

In the interline transfer CCD, the transfer CCD is arranged separatelyfrom the light receiving unit. The action is to transfer the signals,which are stored in the light receiving unit, all at once to thetransfer CCD. After this, the transfer CCD transfers the signals (i.e.,transfers a signal to an adjoining pixel and receives another signalfrom another adjoining pixel). The interline transfer CCD is shut fromthe light, and the light receiving unit and the CCD unit are separated.Even if the light is produced in the light receiving unit while thesignal is being transferred, therefore, it is not mixed into the signalbeing transferred. Therefore, no problem arises even if the light isirradiating while the signal is being transferred.

The timing of the resetting of the CCD sensor is different from that ofthe case of the MOS sensor. In the case of the MOS sensor, the signalsare read out one by one or row by row from the pixels so that theresetting is done one by one or row by row. In the CCD sensor, on theother hand, the reading is started all at once from all pixels. In orderto equalize the storage periods, therefore, it is necessary to reset thepixels all at once. As a result, all the pixels are reset simultaneouslyand the singles are outputted from all the pixels simultaneously.Therefore, the storage periods are equal for all pixels, and the storagetimes are identical. Thus in the CCD sensor, the pixels are reset all atonce and are read all at once. Therefore, this reading method is calledthe batch reset/read method.

In the CCD sensor, on the other hand, the electric charge, as stored bythe light receiving unit, is transferred. After the signal has been onceread, the state (i.e., the charge or potential) of the light receivingunit changes. In other words, the signal of the light receiving unitcannot be read without changing the state of the light receiving unit.Therefore, it can be said that the reading in the CCD sensor is adestructive reading.

On pp. 47 (CCD for Digital Camera Steered from Exclusive Devotion toPixel Number to Improvement in Sensitivity) of Nikkei Electronics (No.732), Dec. 14, 1998, and on pp. 159 (Appearance of CCD Directed toPersonal Computer Camera) of Nikkei Electronics (No. 634), Apr. 24,1995, there is introduced the method of the CCD sensor. On pp. 261 ofNikkei Electronics (Solid Image Pickup Element Cameras Having BeenReported These 18 Years) of Nikkei Electronics, Sep. 14, 1992, therehave been introduced differences between the MOS sensor and the CCDsensor.

Here will be described the sensor unit for the photoelectric conversion.The CCD sensor and the MOS sensor have no special difference in thesensor unit. Usually, a PN type photodiode is used to convert a lightinto electricity. The sensor unit is further exemplified by a PIN typediode, an avalanche diode, an npn buried type diode or a Schottky diode.Another sensor unit may be a photoconductor for an X-ray or a sensor foran infrared ray. This sensor unit is described in “Fundamentals of SolidImage Pickup Element—Device of Electronic Eyes” of Nippon RikohShuppankai written by Takao Ando and Hirohito Komofuchi.

Here will be described appliances suited for the sensor. This sensor isused not only in the ordinary digital still camera or scanner but alsoin the X-ray camera. This camera may use a photoconductor for convertingthe X-ray directly into electric signals or may read the light which hasbeen converted from the X-ray by a fluorescent material or ascintillator. On pp. 203 of Euro Display 99 (X-ray Detectors based onAmorphous Silicon Active Matrix), there has been described the case inwhich the X-ray is converted into the light by the scintillator and thelight is read out. On pp. 21 of IEDM 98 (Amorphous Silicon TFT X-rayImage Sensors), it has been reported that the light is read by means ofamorphous silicon. On pp. 45 of AM-LCD99 (Real-Time Imaging Flat PanelX-ray Detector), it has been reported that the light is read by means ofthe photoconductor.

Next, it will be considered what range the optical intensity of an imagefalls under when the object is to be read by using the CCD or MOS imagesensor.

In the first case of the digital still camera, the optical intensity ofthe object ranges from the black state to such a bright state asexperienced by observing the sun directly. Thus, the optical intensityof the object can take a range from 0 to infinity. Therefore, the imagesensor to be employed here is required to have a wide dynamic range forthe incident light. As a matter of fact, however, the image sensor has alimited dynamic range so that the imaging has to be done for a standardobject illuminance. If the object illuminance is improper, a flash isfrequently used. Alternatively, the shutter is used to adjust theexposure time. The shutter of the digital still camera has two kinds: amechanical shutter and an electronic shutter. The mechanical shuttershuts the optical slit mechanically as in the case of the silver saltcamera. The electronic shutter changes the storage period by adjustingthe drive signal of the image sensor.

On the other hand, the scanner is mostly prepared with a dedicated lightsource. Even if the object had a reflectivity of 100%, therefore, therange of the intensity of the light to enter the image sensor is knownin advance. In other words, a more intense light than that of thededicated light source will not enter. Thus, the storage period may beso set that the output signal may be saturated where the reflectivity isthe highest (as usually experienced by the white paper).

The potential at the N-channel terminal of the photodiode 404 hardlychanges, when the optical intensity is low, but highly changes when theintensity is high. Where the optical intensity is extremely high,however, the potential at the N-channel terminal of the photodiode 404drops as low as the potential at the P-channel terminal of thephotodiode 404 and may be saturated. The potential at the N-channelterminal of the photodiode 404 does not change any more, if saturated,so that the image cannot be correctly read. Even in the high opticalintensity, therefore, the storage period has to be so shortened foradjustment as to prevent the saturation.

If the storage period is excessively shortened, however, it may endalthough the potential at the N-channel terminal of the photodiode 404changes a little. In this case, the signal amplitude is reduced todegrade the image quality.

It is, therefore, desired to prevent the saturation and to enlarge thesignal amplitude even where the optical intensity is high. This desirecan be satisfied if the storage period is so adjusted that the signal tobe outputted may take a value just before the saturation. It is foundfrom the description thus far made that the optimization of the storageperiod is important.

It is, therefore, assumed that the image is taken for examining theoptimum storage period. This image pickup will be called the “trialimaging”.

In the case of the CCD sensor, the reading method is the batchreset/read method, by which the signals are transferred as if they wererelayed in buckets. This method makes it impossible to reset or to readout the signals for every pixels. In other words, it is impossible touse the random reset/read method. Where the signals of one frame areread, therefore, the storage periods of all pixels are equalized. In oneimage pickup, the storage periods cannot be changed for every pixels.Because of the destructive reading, on the other hand, the image pickuphas to be done over again after one trial.

It is assumed in the situations described above that the trial imagingis done by setting the storage period to a value and by reading thesignals of one frame. In this case, however, the signals may have beensaturated already. Then, the trial imaging has to be redone. Moreover,it is necessary to set the tentative storage period again. In this case,however, it is unknown what value the tentative storage period has to beset to. What is known is that the tentative storage period may beshorter than the storage period at the time of the first trial imaging.If the storage period is shorter, the signal amplitude may be so smallthat it cannot be correctly read out. If the storage period is stilllonger, the trial imaging has to be done once more.

Here will be illustrated an example of the case described above. FIG. 7illustrates a change in the potential at the N-channel terminal of thephotodiode after reset. Since the period just before the saturation isthe optimum storage period, it is found from FIG. 7 that the storageperiod is optimum at the period 10 till the reading.

In order to find out the optimum period, a first trial imaging is done.Since the optimum storage period is absolutely unknown at this time, itis assumed that the trial imaging is done for a storage period of 20. Atthis time, however, it is found from FIG. 7 that the saturation has beenalready completed. Therefore, a second trial imaging is done for astorage period of 15. However, the saturation has been still completed.Therefore, a third trial imaging is done over again for a storage periodof 8. Then, the saturation is not completed so that the signal valueaccording to the optical intensity is outputted. The storage period isanalogized from the signal value at this time.

In this example, the trial imaging is done three times. The time periodnecessary for the trial imaging is as long as 20+15+8=43, as shown inFIG. 8.

Thus, for the CCD sensor, it is seriously difficult to find out theoptimum storage period.

Thus, there has been described the storage period for preventing thesignals from being saturated. Here will be described the difficulty forthe signals to be precisely read where the object to be imaged has closegraduations (or brightnesses).

FIG. 9 shows a signal timing chart at the pixel 409. At first, theresetting transistor 407 is turned conductive by controlling the resetsignal line 405. Then, the potential at the N-channel terminal of thephotodiode 404 is charged to the power potential Vdd or the potential ofthe power line 409 so that the pixel is reset. Then, the resettingtransistor 407 is turned nonconductive by controlling the reset signalline 405. After this, the potential at the N-channel terminal of thephotodiode 404 becomes lower if the photodiode 404 is irradiated with alight. Where the photodiode 404 is irradiated with a dark light, theamount of the discharge is so little that the potential at the N-channelterminal of the photodiode 404 does not become so low. Where photodiode404 is irradiated with the bright light, the amount of the discharge isso much that the potential at the N-channel terminal of the photodiode404 becomes extremely low.

At a point of time, moreover, the potential at the N-channel terminal ofthe photodiode 404 is read out as the signal by turning the switchingtransistor 401 conductive.

Here, it is assumed that the photodiode 404 is irradiated with lights ofsimilar intensities. The potentials at the N-channel terminal of thephotodiode 404 in this case are so close, as illustrated in FIG. 9.Therefore, it is made difficult by the influences of noises ordispersions to detect the potential difference.

SUMMARY OF THE INVENTION

The invention has an object to solve the above-specified problems of theprior art.

The CCD sensor cannot perform the random reset/read. Therefore, herewill be described the MOS sensor. This MOS sensor can perform the randomreset/read.

In the invention, by making use of the possibility of the randomreset/read, there is performed the trial imaging in which the signal isoutputted by changing the storage period of each pixel. It is thendecided from the signal amplitude whether or not the pixel is justbefore saturated. Moreover, the storage period just before thesaturation is assumed to be optimum.

By performing this trial imaging, it is possible to find out the optimumstorage period for a short time. If the ordinary imaging is done bysetting the optimum storage period, moreover, the signal is notsaturated so that the signal amplitude according to the opticalintensity can be obtained. Because of the large signal amplitude, on theother hand, the performance of the sensor is improved.

Here, the “ordinary imaging” is to read out the image to be imaged. Bythis ordinary imaging, the image informations can be read out.

The method for outputting the signals from the pixels by changing thestorage period is performed as follows. At first, all pixels of the MOSsensor are reset all at once. After this, the signals are read out foreach pixel or row. Then, the storage periods of the signals to beoutputted are so different for the pixels that they increase pixel bypixel or row by row. This is because the storage period is one from thereset time to the output of the signal from the pixel and because thestorage period becomes gradually longer if all pixels are reset all atonce and if the signals are then sequentially outputted.

If the signals are then read out after all pixels of the MOS sensor werereset all at once, the output signal amplitude changes for each storageperiod. Moreover, the output signal value does not change after thesaturation. At this stage, the storage period at the saturation is knownso that the value of the storage period just before the saturation canbe found out. And, this value may be used as the optimum storage period.

Here will be described the constructions of the invention.

According to the invention, there is provided a method for driving a MOSsensor having a plurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted.

According to the invention, there is provided a method for driving a MOSsensor having a plurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when the signals ofsaid selected pixels are saturated is set to the value of a storageperiod.

According to the invention, there is provided a method for driving a MOSsensor having a plurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the plurality of pixels of said image pickup unit aresequentially selected, after all reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when the signalhaving the largest amplitude of said selected pixels is saturated is setto the value of a storage period.

According to the invention, there is provided a method for driving a MOSsensor having a plurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when thephotoelectric conversion elements of said selected pixels are saturatedis set to the value of a storage period.

According to the invention, there is provided a method for driving a MOSsensor having a plurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the plurality of pixels of said image pickup unit aresequentially selected, after all reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when any one of thephotoelectric conversion elements of said selected pixels is saturatedis set to the value of a storage period.

According to the invention, there is provided a MOS sensor drivingmethod,

wherein the value of said storage period is set by irradiating saidimage pickup unit with that of the highest intensity of the lights whichhave been reflected by an object to enter said image pickup unit.

According to the invention, there is provided a MOS sensor drivingmethod,

wherein the signals are outputted exclusively from those of theplurality of pixels of said image pickup unit that belong to a limitedarea.

According to the invention, there is provided a MOS sensor drivingmethod,

wherein the image of an object is picked up by using said storageperiod.

According to the invention, there is provided a MOS sensor comprising aplurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted.

According to the invention, there is provided a MOS sensor,

wherein the signals are outputted exclusively from those of theplurality of pixels of said image pickup unit that belong to a limitedarea.

According to the invention, there is provided a MOS sensor comprising aplurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when the signals ofsaid selected pixels are saturated is set to the value of a storageperiod.

According to the invention, there is provided a MOS sensor comprising aplurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the plurality of pixels of said image pickup unit aresequentially selected, after all reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when the signalhaving the largest amplitude of said selected pixels is saturated is setto the value of a storage period.

According to the invention, there is provided a MOS sensor comprising aplurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the pixels of said image pickup unit are sequentially selected,after all the plurality of the pixels reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when thephotoelectric conversion elements of said selected pixels are saturatedis set to the value of a storage period.

According to the invention, there is provided a MOS sensor comprising aplurality of pixels in an image pickup unit,

wherein said pixel includes a photoelectric conversion element, aresetting transistor and a signal amplifier circuit,

wherein said photoelectric conversion element is connected at its oneterminal with the source terminal or drain terminal of said resettingtransistor and at its other terminal with a photoelectric conversionelement side power line,

wherein said resetting transistor is connected at its gate terminal witha reset signal line, and

wherein said resetting transistor is connected at its source terminal ordrain terminal with said photoelectric conversion element and the inputterminal of said signal amplifier circuit and at its other with a resetside power line,

whereby the plurality of pixels of said image pickup unit aresequentially selected, after all reset simultaneously, so that thesignals of the selected pixels are outputted, and

whereby the period from said reset time to the time when any one of thephotoelectric conversion elements of said selected pixels is saturatedis set to the value of a storage period.

According to the invention, there is provided a MOS sensor,

wherein the value of said storage period is set by irradiating saidimage pickup unit with that of the highest intensity of the lights whichhave been reflected by an object to enter said image pickup unit.

According to the invention, there is provided a MOS sensor,

wherein the signals are outputted exclusively from those of theplurality of pixels of said image pickup unit that belong to a limitedarea.

According to the invention, there is provided a MOS sensor,

wherein the image of an object is picked up by using said storageperiod.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a circuit diagram of a MOS sensor of the invention;

FIG. 2 is a timing chart of the MOS sensor of the invention;

FIG. 3 is a circuit diagram of the passive sensor of the prior art;

FIG. 4 is a circuit diagram of the active sensor of the prior art;

FIG. 5 is a circuit diagram of the source follower circuit;

FIG. 6 is a timing chart in the active sensor;

FIG. 7 is a timing chart in the active sensor;

FIG. 8 is a diagram illustrating a trial imaging;

FIG. 9 is a timing chart in the active sensor;

FIG. 10 is a diagram illustrating a change of an output signal in atrial imaging;

FIG. 11 is a block diagram of an area sensor of the invention;

FIG. 12 is a circuit diagram of a pixel of an active sensor of theinvention;

FIG. 13 is a circuit diagram of a pixel of an active sensor of theinvention;

FIG. 14 is a circuit diagram of a signal processing circuit of theinvention;

FIG. 15 is a circuit diagram of a final output amplifying circuit of theinvention;

FIG. 16 is a circuit diagram of a final output amplifying circuit of theinvention;

FIG. 17 is a timing chart in a trial imaging of the invention;

FIG. 18 is a timing chart in the invention;

FIG. 19 is a diagram illustrating a change of an output signal in thetrial imaging of the invention;

FIG. 20 is a timing chart in the invention;

FIG. 21 is a diagram illustrating a change of an output signal in thetrial imaging of the invention;

FIG. 22 is a diagram showing an area to be imaged on trial in an areasensor of the invention;

FIGS. 23A and 23B are diagrams showing the case in which a fingerprintis to be read in the area sensor of the invention;

FIG. 24 is a timing chart in the invention;

FIGS. 25A to 25D are diagrams showing a process for manufacturing animage sensor of the invention;

FIGS. 26A to 26D are diagrams showing the process for manufacturing theimage sensor of the invention;

FIGS. 27A to 27C are diagrams showing the process for manufacturing theimage sensor of the invention;

FIGS. 28A and 28B are diagrams showing the process for manufacturing theimage sensor of the invention;

FIGS. 29A and 29B are diagrams of electronic devices using the imagesensor of the invention;

FIGS. 30A and 30B are diagrams of electronic devices using the imagesensor of the invention; and

FIG. 31 is a diagram of an electronic device using the image sensor ofthe invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 shows one example of a pixel circuit diagram of a MOS activesensor. A photodiode 104 is connected at its P-channel terminal with apower reference line 112 and at its N-channel terminal with the inputterminal of a signal amplifier circuit 106. The output terminal and thepower supply terminal of the signal amplifier 106 are connected with apower line 109 and the drain terminal of a switching transistor 101.This switching transistor 101 is connected at its gate terminal with agate signal line 102 and at its source terminal with a signal outputline 103. A resetting transistor 107 is connected at its gate terminalwith a reset signal line 105. The source terminal and the drain terminalof the resetting transistor 107 are connected with the power line 109and the input terminal of the signal amplifier circuit 106.

Here, the switching transistor 101 and the resetting transistor 107 maytake either the P-channel or the N-channel.

Here, the signal amplifier circuit 106 is frequently composed of onetransistor. However, the signal amplifier circuit 106 may be composed ofa plurality of transistors or capacitors as of the photo-gate type.

The basic actions are as follows. At first, when the reset signal line105 turns conductive, the photodiode 104 is reset. When the gate signalline 102 then turns conductive, the signal of the photodiode 104 isoutputted to the signal output line 103.

Let it be assumed that pixels, as shown in FIG. 1, are arranged over aplurality of rows. FIG. 2 illustrates a signal timing charts in thetrial imaging of this case. At first, the voltages of the reset signallines 105 of all pixels are controlled to reset the photodiodes 104 ofall pixels simultaneously. After this, the gate signal lines 102 arecontrolled row by row (or pixel by pixel) to output signals. Theseoutputs are started from the first row and are then scanned.

The scans are returned again from the last row to the first and arecontinued to the second row, the third row and so on.

Here, it is not absolutely necessary to output the signals from thefirst row. Nor is it absolutely necessary to output the signals from allrows.

Here, the storage period is a period from the resetting time to the timewhen the signals are read out. Therefore, the storage period isdifferent for a row if the pixels of all rows are reset all at once andif the signals are then outputted row by row. In other words, thestorage period increases each time the rows change. The output signalchanges with a product of the intensity of the light of an object andthe storage period. Therefore, the output signal value grows graduallylarger. The transition of the output signal at this time is illustratedin FIG. 10.

At this trial imaging time, however, it is assumed that the whole faceis irradiated with a homogeneously light. Therefore, an equal outputsignal value is obtained for the pixels of a row.

The output signal value in the first row is still low. As the rowincreases to a k-th row, moreover, the output signal value is notsaturated yet. When the row comes to an m-th row, moreover, the outputsignal value comes just before the saturation. As the row number furtherincreases, moreover, the output signal does not change any more but issaturated.

It is found out from FIG. 10 that the storage period of the signal inthe m-th row is the optimum. By this trial imaging action, it ispossible to determine the optimum storage period easily and quickly.

After this, there may be done the ordinary imaging action. However, thestorage period to be used at this time is the value which has beendetermined by the trial imaging.

Here, this embodiment could be applied to the MOS passive sensor.However, this embodiment could not be applied to the CCD sensor becauseof its batch reset/read.

Here, the light may not have the homogeneous irradiation at the trialimaging time.

Here in the MOS sensor, the signal may be outputted at the trial imagingtime exclusively from a portion of the screen because of its randomreset/read.

Where the storage period is changed row by row, the signals need not beoutputted from all pixels of each row. It is sufficient to output thesignals from one pixel for one row.

Embodiment 1

Next, a description will be given of an example of an area sensormounted with a drive circuit at a periphery thereof and arranged withpixels two-dimensionally. FIG. 11 shows a circuit diagram of a totalthereof. First, there is provided an image pickup unit 1105 arrangedwith pixels two-dimensionally. Further, there are arranged drivecircuits for driving a gate signal line and a reset signal line ofrespective pixels on the left and on the right of the image pickupportion 1105. In FIG. 11, a drive circuit 1106 for a gate signal line isarranged on the left side and a drive circuit 1107 for a reset signalline is arranged on the right side.

Further, on an upper side of the image pickup portion 1105, there arearranged circuits for signal processing. In FIG. 11, a biasing circuit1103 is arranged on the upper side of the image pickup portion 1105. Thebiasing circuit 1103 constitutes a source follower circuit by beingpaired with an amplifying transistor of respective pixels. On the upperside of the biasing circuit 1103, there is arranged a circuit 1102 forsampling and holding and signal processing. In the circuit, there arearranged circuits for temporarily holding a signal, executinganalog-digital conversion and reducing noise. On the upper side of thesampling and holding and signal processing circuit 1102, there isarranged a drive circuit 1101 for a signal output line. The drivecircuit 1101 for a signal output line outputs a signal for successivelyoutputting the temporarily held signals. Further, there is arranged acircuit 1104 for amplifying a final output before outputting a signal tooutside. In the circuit, a signal which is successively outputted by thesampling and holding and signal processing circuit 1102 and the drivecircuit 1101 for a signal output line, is amplified before beingoutputted to outside. Therefore, the circuit is not needed when thesignal is not amplified, however, the circuit is frequently arranged inreality.

Next, circuit diagrams of respective portions will be shown. First, FIG.12 shows a circuit diagram of a circuit 1108 of an i-th row and j-thcolumn pixel portion as an example in the image pickup portion 1105which is arranged with pixels two-dimensionally. In FIG. 12, the circuit1108 is constituted by a P-channel type resetting transistor 1207, aP-channel type switching transistor 1201, an N-channel type amplifyingtransistor 1206 and a photoelectric conversion element (here, aphotodiode 1204 which is most representative). In the photodiode 1204, aP-channel side terminal thereof is connected to a power source referenceline 1212 and an N-channel side terminal thereof is connected to a gateterminal of the amplifying transistor 1206. A gate terminal of theresetting transistor 1207 is connected with an i-th row reset signalline 1205 and a source terminal and a drain terminal thereof areconnected to a j-th column power source line 1209 and the gate terminalof the amplifying transistor 1206. A gate terminal of the switchingtransistor 1201 is connected to an i-th row gate signal line 1202 and asource terminal and a drain terminal thereof are connected to the j-thcolumn power source line 1209 and the amplifying transistor 1206. Asource terminal and a drain terminal of the amplifying transistor 1206are connected to a j-th column signal output line 1203 and the switchingtransistor 1201.

In FIG. 12, a p-channel type is used in the resetting transistor 1207.However, the resetting transistor may be of an N-channel type. However,in the case of the N-channel type, in resetting operation, voltagebetween the gate and the source cannot be made large. Therefore, theresetting transistor is operated in a saturated region and thephotodiode 1204 cannot be charged sufficiently. Therefore, although theresetting transistor can be operated with the N-channel type, theP-channel type is more preferable.

It is preferable that the switching transistor 1201 is arranged betweenthe j-th column power source line 1209 and the amplifying transistor1206 and the P-channel type is used therefor. However, an N-channel typemay be used therefor since the switching transistor 1201 is operatedeven with the N-channel type similar to the conventional case and may bearranged between the j-th column signal output line 1203 and theamplifying transistor 1206. However, the N-channel type one is difficultto correctly output a signal and accordingly, it is preferable that theswitching transistor 1201 is arranged between the j-th column powersource line 1209 and the amplifying transistor 1206 and the P-channeltype is used therefor.

In FIG. 12, the N-channel type is used for the amplifying transistor1206. However, a P-channel type can be used therefor. However, in thatcase, when the amplifying transistor 1206 is operated as a sourcefollower circuit by being combined with a biasing transistor, it isnecessary to change a method of connecting the circuit. That is, theamplifying transistor 1206 is not operated by simply changing thepolarity of the amplifying transistor 1206 in the circuit diagram ofFIG. 12.

Hence, FIG. 13 shows an example of a circuit constitution when theamplifying transistor of the P-channel type is used. A difference ofconstitution from that of FIG. 12 resides in that the polarity of anamplifying transistor 1306 is of the P-channel type, a direction of aphotodiode is reversed and a power source line and a power sourcereference line are switched. When the P-channel type is used for theamplifying transistor, it is necessary to use the P-channel type in abiasing transistor. Because the biasing transistor needs to operate as aconstant current source. Therefore, in FIG. 13, for reference, a biasingtransistor 1311 is also illustrated. The i-th row and j-th column pixelportion circuit 1108 shown in FIG. 13 is constituted by an N-channeltype resetting transistor 1307, an N-channel type switching transistor1301, a P-channel type amplifying transistor 1306 and a photoelectricconversion element (here, a photodiode 1304 which is mostrepresentative). An N-channel side terminal of the photodiode 1304 isconnected to a power source line 1309 and a P-channel side terminalthereof is connected to a gate terminal of the amplifying transistor1306. A gate terminal of the resetting transistor 1307 is connected withan i-th row reset signal line 1305 and a source terminal and a drainterminal thereof are connected to a j-th column power source referenceline 1312 and the gate terminal of the amplifying transistor 1306. Agate terminal of the switching transistor 1301 is connected to an i-throw gate signal line 1302 and a source terminal and a drain terminalthereof are connected to the j-th column power source reference line1312 and the amplifying transistor 1306. A source terminal and a drainterminal of the amplifying transistor 1306 are connected to a j-th rowsignal output line 1303 and the switching transistor 1301. A gateterminal of the biasing transistor 1311 is connected with a bias signalline 1301 and a source terminal and a drain terminal thereof areconnected to the j-th column signal output line 1303 and the powersource line 1309.

In FIG. 13, the N-channel type is used for the resetting transistor1307. However, the resetting transistor may be of a P-channel type.However, in the case of the P-channel type, in resetting operation,voltage between the gate and the source cannot be made large. Therefore,the resetting transistor is operated in a saturated region and thephotodiode 1304 cannot be charged sufficiently. Therefore, although theresetting transistor is operated by the P-channel type, the N-channeltype is preferable.

In FIG. 13, it is preferable that the switching transistor 1301 isarranged between the j-th column power source reference line 1312 andthe amplifying transistor 1306 and the N-channel type is used therefor.However, since the switching transistor 1301 is operated also by aP-channel type, the P-channel type may be used or may be arrangedbetween the j-th column signal output line 1303 and the amplifyingtransistor 1306. However, it is difficult to correctly output a signaland therefore, it is preferable that switching transistor 1301 isarranged between the j-th column power source reference line 1309 andthe amplifying transistor 1306 and the N-channel type is used therefor.

In this way, as is apparent by comparing FIG. 12 and FIG. 13, when thepolarity of the amplifying transistor is changed, an optimumconstitution of the transistor and the direction of the photodiode arealso changed.

In FIG. 12, current is supplied from a single piece of the power sourceline to both of the switching transistor 1201 and the resettingtransistor 1207. In FIG. 13, current is supplied from a single piece ofthe power source reference line to both of the switching transistor 1301and the resetting transistor 1307. In this way, by matching thedirection of the photodiode and the polarity of the amplifyingtransistor, wirings can be shared.

Next, FIG. 14 shows a circuit diagram of a j-th column peripheralportion circuit 1109 as a circuit for one column from the biasingcircuit 1103 and the sampling and holding signal processing circuit1102. The biasing circuit 1103 is arranged with a biasing transistor1411. The polarity is the same as the polarity of the amplifyingtransistor of respective pixels. Therefore, when the amplifyingtransistor of pixel is of an N-channel type, the biasing transistor isalso of the N-channel type. In FIG. 14, the biasing transistor 1411 isof the N-channel type. A gate terminal of the biasing transistor 1411 isconnected with a bias signal line 1410 and a source terminal and a drainterminal thereof are connected to a j-th column signal output line 1403and a power source reference line 1412 (when the biasing transistor isof a P-channel type, a power source line is used in place of the powersource reference line). The biasing transistor 1411 is operated as asource follower circuit by being paired with the amplifying transistorof respective pixels. A gate terminal of a transferring transistor 1413is connected with a transfer signal line 1414 and a source terminal anda drain terminal thereof are connected to a j-th column signal outputline 1403 and a storage capacitor 1415. The transferring transistor isoperated when potential of the signal output line 1403 is transferred tothe storage capacitor 1415. Therefore, a transferring transistor of aP-channel type may be added and connected in parallel with the N-channeltype transferring transistor 1413. The storage capacitor 1415 isconnected to the transferring transistor 1413 and the power sourcereference line 1412. The role of the storage capacitor 1415 resides intemporarily storing a signal outputted from the signal output line 1403.A gate terminal of a discharging transistor 1416 is connected to apredischarge signal line 1417 and a source terminal and a drain terminalthereof are connected to the storage capacitor 1415 and the power sourcereference line 1412. The discharging transistor 1416 is operating totemporarily discharge electric charge stored in the storage capacitor1415 before inputting the potential of the signal output line 1403 tothe storage capacitor 1415.

Further, an analog-digital signal conversion circuit or a noise reducingcircuit can also be arranged.

Further, a finally selecting transistor 1419 is connected between thestorage capacitor 1415 and a final output line 1420. A source terminaland a drain terminal of the finally selecting transistor 1419 areconnected to the storage capacitor 1415 and the final output line 1420,and a gate terminal thereof is connected to a j-th column finalselection line 1418. The final selection line is scanned successivelyfrom a first column. Further, when the j-th column final selection line1418 is selected and the finally selecting transistor 1419 is broughtinto a conductive state, potential of the storage capacitor 1415 andpotential of the final output line 1420 become equal to each other. As aresult, a signal stored in the storage capacitor 1415 can be outputtedto the final output line 1420. However, when electric charge is storedin the final output line 1420 before outputting the signal to the finaloutput line 1420, the potential in outputting the signal to the finaloutput line 1420 is influenced by the electric charge. Therefore, beforeoutputting the signal to the final output line 1420, the potential ofthe final output line 1420 must be initialized to a certain potentialvalue. In FIG. 14, a final resetting transistor 1422 is arranged betweenthe final output line 1420 and a power source reference line 1412.Further, a gate terminal of the finally resetting transistor 1422 isconnected with a j-th column final reset line 1421. Further, beforeselecting the j-th column final selection line 1418, the j-th columnfinal reset line 1421 is selected and the potential of the final outputline 1420 is initialized to potential of the power source reference line1412. Thereafter, the j-th column final selection line 1418 is selectedand the signal stored to the storage capacitor 1415 is outputted to thefinal output line 1420.

The signal outputted to the final output line 1420 may be outputted tooutside as it is. However, the signal is frequently amplified beforebeing outputted to outside since the signal is very weak. FIG. 15 showsa circuit of a final portion circuit 1110 as a circuit therefor. Thereare various circuits for amplifying a signal such as an operationalamplifier. Although any circuit may be used so far as the circuit is acircuit for amplifying a signal, in this case, as the simplest circuitconstitution, a source follower circuit is shown. FIG. 15 shows a caseof an N-channel type. An input to the final output amplifying circuit1104 is a final output line 1502. The final output line 1502 isoutputted with a signal successively from a first column. The signal isamplified by the final output amplifying circuit 1104 and is outputtedto outside. The final output line 1502 is connected to a gate terminalof an amplifying transistor 1504 for amplifying final output. A drainterminal of the amplifying transistor 1504 for amplifying final outputis connected to a power source line 1506 and a source terminal thereofconstitutes an output terminal. A gate terminal of a biasing transistor1503 for amplifying final output is connected to a bias signal line 1505for amplifying final output. A source terminal and a drain terminalthereof are connected to a power source reference line 1507 and a sourceterminal of the amplifying transistor 1504 for amplifying final output.

FIG. 16 shows a circuit diagram when a source follower circuit in thecase of a P-channel type is used. A difference between FIG. 15 and FIG.16 resides in that the power source line and the power source referenceline are reversed. A final output line 1602 is connected to a gateterminal of an amplifying transistor 1604 for amplifying final output. Adrain terminal of the amplifying transistor 1604 for amplifying finaloutput is connected to a power source reference line 1607 and a sourceterminal thereof constitutes an output terminal. A gate terminal of abiasing transistor 1603 for amplifying final output is connected to abias signal line 1605 for amplifying final output. A source terminal anda drain terminal thereof are connected to a power source line 1606 andthe source terminal of the amplifying transistor 1604 for amplifyingfinal output. Values of potential of the bias signal line 1605 foramplifying final output and potential of the bias signal line 1505 foramplifying final output in the case of using the N-channel type, differfrom each other.

In FIG. 15 and FIG. 16, the source follower circuit of only one stage isconstituted. However, source follower circuits of a plurality of stagesmay be constituted. For example, when source follower circuits of twostages are constituted, an output terminal of a first stage may beconnected to an input terminal of a second stage thereof. Further, inthe respective stages, either of the N-channel type and the P-channeltype may be used.

The drive circuit 1106 for a gate signal line, the drive circuit 1107for a reset signal line and the drive circuit 1101 for a signal outputline are circuits simply outputting pulse signals. Therefore, thecircuits can be implemented by using a publicly-known technology.

Next, a description will be given of a timing chart of signals whentrial imaging is done. First, FIG. 17 shows a timing chart of thecircuits of FIG. 11 and FIG. 12. First, the reset signal lines of allrows are controlled to reset pixels at the same time. Thereafter, thegate signal lines are successively scanned from the first row. Forexample, an (i−1)-th row is selected, successively, an i-th row isselected and successively, an (i+1)-th row is selected. Then, after thescan is performed to the last row, the gate signal lines are similarlyscanned successively from the first row and the similar operation isrepeated.

A time period from when the pixel is reset until the gate signal line isselected and signal is outputted constitutes a storage period. Duringthe storage period, the photodiode stores electric charge generated bylight. In the respective rows, a timing of resetting is same and atiming of outputting the signal is different.

Next, FIG. 18 shows a timing chart of signals in FIG. 14. Since theoperation is repeated, as an example, a consideration will be given ofthe case of selecting the gate signal line of the i-th row. First, afterselecting the gate signal line 1202 of the i-th row, the predischargesignal line 1417 is selected and the discharging transistor 1416 isbrought into a conductive state. Thereafter, the transfer signal line1414 is selected. Then, a signal of respective rows is outputted fromthe pixel of the i-th row to the storage capacitor 1415 of therespective rows.

After storing signals of all of the pixels at the i-th row in thestorage capacitors 1415 of the respective columns, signals of therespective columns are successively outputted to the final output line1420. During a time period after the transfer signal line 1414 is notselected until the gate signal line is selected, all the columns arescanned by the drive circuit 1101 for a signal output line. First, thefinal reset line of the first column is selected, the final resettingtransistor 1422 is brought into a conductive state and the final outputline 1420 is initialized to the potential of the power source referenceline 1412. Thereafter, the final selection line 1418 of the first columnis selected, the finally selecting transistor 1419 is brought into aconductive state and a signal of the storage capacitors 1415 of thefirst column is outputted to the final output line 1420. Next, the finalreset line of a second column is selected, the final resettingtransistor 1422 is brought into a conductive state and the final outputline 1420 is initialized to the potential of the power source referenceline 1412. Thereafter, the final selection line 1418 of the secondcolumn is selected, the finally selecting transistor 1419 is broughtinto a conductive state and a signal of the storage capacitor 1415 atthe second column is outputted to the final output line 1420.Thereafter, similar operation is repeated. In the case of a j-th column,the final reset line of the j-th column is selected, the finallyresetting transistor 1422 is brought into a conductive state and thefinal output line 1420 is initialized to the potential of the powersource reference line 1412. Thereafter, the final selection line 1418 ofthe j-th column is selected, the finally selecting transistor 1419 isbrought into a conductive state and a signal of the storage capacitor1415 of the j-th column is outputted to the final output line 1420.Successively, the final reset line of a (j+1)-th column is selected, thefinally resetting transistor 1422 is brought into a conductive state andthe final output line 1420 is initialized to the potential of the powersource reference line 1412. Thereafter, the final selection line 1418 ofthe (j+1)-th column is selected, the final selecting transistor 1419 isbrought into a conductive state and a signal of the storage capacitor1415 of the (j+1)-th column is outputted to the final output line 1420.Thereafter, similar operation is repeated and signals of all the columnsare successively outputted to the final output line. During the timeperiod, the potential of the bias signal line 1410 stays to be constant.The signal outputted to the final output line 1420 is amplified by thecircuit 1104 for amplifying final output and is outputted to outside.

Next, the gate signal line of a (i+1)-th row is selected. Then, theoperation is carried out similar to that in selecting the gate signalline of the i-th row. Further, the gate signal line of a successive rowis selected and similar operation is repeated.

FIG. 19 is a diagram illustrating an output signal (an output from thecircuit 1104 for amplifying final output) which changes for each row onthe case in which the whole face is irradiated with the homogeneouslight. However, the same output signal value is outputted from the pixelin the same row and therefore, only one output signal for each row isillustrated.

First, the value of the signal outputted from a first row is smallbecause a storage period is short. Then, as the row number increases, anoutput signal value grows larger. In a case where the signal is notsaturated after signals are outputted from all rows, the signal isoutputted again from the first row. Then, if the signal begins to besaturated just after the pixel of the m-th row at second read-out, thestorage period of the pixel of the m-th row at second read-out can beoptimum storage period.

The above mentioned trial imaging is done, thereby the optimum storageperiod can be easily and quickly known.

Thereafter, the optimum storage period is set to perform ordinaryimaging. In the operation, the difference between an ordinary imagingand a trial imaging is only the timing of resetting. Next, a descriptionwill be given of a timing chart of signals at an ordinary imaging.

First, FIG. 20 shows timing charts of the circuits of FIG. 11 and FIG.12. The reset signal lines are successively scanned from the first row.For example, an (i−1)-th row is selected, successively, an i-th row isselected and successively, an (i+1)-th row is selected. A period untilselecting the same row again corresponds to the frame period. The gatesignal lines are similarly scanned successively from the first row.However, a timing of starting to scan the gate signal line is later thana timing of starting to scan the reset signal line. For example, whenattention is paid to a pixel of the i-th row, the reset signal line ofthe i-th row is selected and thereafter, the gate signal line of thei-th row is selected. When the gate signal line of the i-th row isselected, a signal is outputted from the pixel of the i-th row. A timeperiod from when the pixel is reset until the signal is outputtedconstitutes a storage period. During the storage period, the photodiodestores electric charge generated by light. In the respective rows, atiming of resetting and a timing of outputting the signal, differ fromeach other. Therefore, although the storage period is equal in thepixels of all the rows, the timing of this storage differs.

The timing chart of signals shown in FIG. 14 is the same as that shownin FIG. 18.

In this way, only by changing the timing of controlling the reset signalline, a trial imaging and an ordinary imaging can be easily changed.

The MOS active sensor is capable of performing a random reset/read anon-destructive reading, so that such an operation becomes possible.However, the operation can not be realized by using a CCD sensor.

Note that a MOS passive sensor can be applied. However, since thereading at a MOS passive sensor is destructive reading, the signal readout can not be done after second read out at a trial imaging. Therefore,it is necessary to find out an optimum storage period for one scanning.In the case, after resetting, output time of a first row signal iscontrolled and trial imaging may be performed. Note that the time fromresetting until a signal of first row is outputted may be controlled ina case of using a MOS active sensor.

Note that the sensor unit for the photoelectric conversion isexemplified by a PIN type diode, an avalanche diode, a npn buried typediode, a Schottky diode, a photoconductor for an X-ray or a sensor foran infrared ray in addition to the ordinary PN type photodiode. Further,after the X-ray is converted into light by a fluorescent material or ascintillator, the light may be read out.

As mentioned above, the photoelectric conversion element is oftenconnected to an input terminal of the source-follower circuit. However,as of the photo-gate type, switches may be inserted therebetween. On theother hand, as of the logarithmic conversion type, signals which weretreated to be logarithmic value of the light intensity, may be inputtedto input terminal.

Note that an area sensor arranged with pixels two dimensionally wasdescribed in the present embodiment, however, a line sensor arrangedwith pixels one-dimensionally can be realized.

As described in this embodiment, homogeneous light is irradiated at thetrial imaging time, and it can be applied at the trial imaging by thescanners. Namely, irradiation with homogeneous light can be applied atthe trial imaging using whole white documents for correction beforeimaging real documents. For example, in a case where light intensitiesof the power source of scanners are unknown, it is possible to determinethe optimum storage period easily and quickly by applying the presentembodiment. In addition, the ordinary imaging is performed for thedocument to be actually read, thereby it is possible to read out withaccuracy.

Embodiment 2

Embodiment 1 has been described on the case in which the whole face isirradiated with the homogeneous light at the trial imaging time. Herewill be described the case in which the whole face is irradiated with anon-uniform light at the trial imaging time.

However, the actions and the circuits are substantially identical tothose of Embodiment 1. Since the whole face is irradiated with thenon-uniform light, however, even the pixels of the same row, i.e., thepixels of the same storage period have different signal values. Wherethe transition of the signal values for row numbers are illustrated, asillustrated in FIG. 19, therefore, it is unknown what value should beemployed as the output signal value in a certain row.

In this case, the output signal value having the highest amplitude value(corresponding to the highest optical intensity) in each row may be usedand plotted in the graph shown in FIG. 19. Then, all the remainingcontents are identical to those of Embodiment 1.

This embodiment of the irradiation with the heterogeneous light in thetrial imaging can be applied to the case in which a wholly blackishdocument (of the newspaper or the like) is to be read out. This documentis hard to read out exactly because it has little gradation differencebetween the character portion and the remaining portion.

In this case, therefore, the document to be actually read is subjectedat first to the trial imaging. In this trial imaging, the sensor isirradiated on its whole face with the non-uniform light. In this case,the graph of FIG. 10 illustrating the transition of the signal valueagainst the row number is illustrated in FIG. 21. The highest value isused as the output signal amplitude value of each row. The largestoutput signal amplitude corresponds to the brightest case. It is foundfrom FIG. 21 that the storage period on the n-th row at the third trialis optimum for the case in which the wholly blackish document is to beread. The storage period at this time is designated by Ts1.

If the wholly whitish document is to be image on trial, it is found fromFIG. 21 that the storage period on the m-th row at the second trial isoptimum. The storage period at this time is designated by Ts2.

Where the ordinary document is to be read, the storage period may be setto Ts2 for the imaging. Where the blackish document such as thenewspaper is to be read, however, the storage period may be reset forthe imaging. This reset makes the signal amplitude larger to improve thereading precision.

If the storage period is thus reset for the type of the document to beread, it is possible to read a clearer image. The optimum period resetcan be easily found out for a short time by performing the trial imagingof Embodiment 1 or 2.

Embodiment 3

In Embodiments 1 and 2, the signals have been outputted from the pixelsof the whole face for the trial imaging time. However, this trialimaging may be made on only an area in the screen. Therefore, thisembodiment can be freely combined with Embodiment 1 or 2.

Let it be assumed that the trial imaging is made on the area of thepixels from the r-th row to the s-th row and from the t-th column to theu-th column, as illustrated in FIG. 22.

The signal timing chart at this time is as follows. At first, all thepixels, as contained in the object area to be imaged on trial, aresimultaneously reset, although the pixels of the remaining areas mayalso be reset. After this, the signals are outputted from the r-th row.In short, the signals begin to be outputted from the r-th row after thereset but not from the first row.

The signals are outputted from the pixels of one row all at once, butwhat is necessary is the signals from the t-th column to the u-thcolumn. Therefore, the remaining signals may be inhibited from going outof a final output amplifier circuit 1104 by controlling the waveform ata signal output line drive circuit 1101. Alternatively, the unnecessarysignals may be ignored after the output of one row.

The waveform at the signal output line drive circuit 1101 can becontrolled by using the well-known circuits or signals.

Next, the gate signal lines are scanned to output the signals from the(r+1)-th row and then from the (r+2)-th row, and these operations arerepeated. After the outputting of the s-th row, the scanning is notproceeded to the (s+1)-th row but is returned to the r-th row to outputthe signals. And, the scanning is proceeded to the (r+1)-th row, andthese operations are repeated.

In this way, the storage periods are made gradually longer for everyrows. The storage period can be prevented from becoming discontinuous byreturning the scanning to the r-th row after the outputting of the s-throw.

This control of the gate signal lines can be realized by using thewell-known circuits and signals in a gate signal line drive circuit1106.

This free reading of the signals can be made possible because the MOSsensor is of the random reset/read type. The free reading cannot berealized in the CCD sensor.

This embodiment, in which the determined area is exclusively imaged ontrial, can be applied, for example, to the case in which the light fromthe object is incident on only the central portion of the screen whereasthe light of no significance is incident on the peripheral portion ofthe screen. This case can be exemplified by the reading of afingerprint.

Thus, FIGS. 23A and 23B are schematic views showing the case in which afinger is placed on the screen to read out its print. FIG. 23A is a topplan view, and FIG. 23B is a sectional view. There is a pixel array2301, in which a number of pixels are arranged. The imageable area isthe entirety of the pixel array 2301. A reading object 2302 or thefinger is placed on the area. However, the finger is actually placed ononly an imaging object area 2303 but not on an imaging non-object area2304. Into this imaging non-object area 2304, therefore, there comesnoises such as the ambient light. In this case, the correct storageperiod cannot be found out if the whole screen is image on trial.Therefore, the trial imaging is made on the area where the finger isplaced.

When the fingerprint is to be read, on the other hand, its patternundulations have close graduations. This makes it difficult to read thepattern precisely. FIG. 24 is a timing chart illustrating the potentialsof the N-channel terminals of the photodiodes of pixels in the case ofreading the fingerprint. At first, the pixels are reset. After this, thepotentials of the N-channel terminals of the photodiodes becomes loweraccording to the optical intensity. The potentials hardly becomes lower,when the black document is to be read, but becomes drastically lowerwhen the white document is to be read. In the ordinary case, the storageperiod is set so that the signals are not saturated when the whitedocument is to be read. When the fingerprint is to be read, however, itspattern undulations have the close graduations so that N-channelterminals of the photodiodes also have close potentials. It is,therefore, difficult to read the pattern undulations of the fingerprintprecisely.

In this case, the finger is pushed and imaged on trial by employing onlythe area pushed thereby as the object. Then, the sensor is irradiatedwith the heterogeneous light when the trial imaging is made. And, theperiod just before the signal (having the largest signal amplitude) ofthe brightest portion is saturated is adopted as the optimum storageperiod.

After the ordinary imaging, the potentials of the N-channel terminals ofthe photodiodes become so low that the potential difference between thesignals of the undulations read from the fingerprint become large. Thismakes it so easy to detect the graduation differences so that even animage such as the fingerprint having the small graduation differencescan be read out.

Embodiment 4

A method of manufacturing a sensor of this invention on a glass using aTFT is explained with reference to FIGS. 25A to 28B.

First, as shown in FIG. 25A, a base film 201 is formed to a thickness of300 nm on a glass substrate 200. A silicon oxinitride film is laminatedas the base film 201 in this embodiment. At this point, it isappropriate to set the nitrogen concentration to between 10 and 25 wt %in the film contacting the glass substrate 200. In addition, it iseffective that the base film 201 has a thermal radiation effect, and aDLC (diamond-like carbon) film may also be provided.

Next, an amorphous silicon film (not shown in the figure) is formed witha thickness of 50 nm on the base film 201 by a known deposition method.Note that it is not necessary to limit to the amorphous silicon film,and a semiconductor film containing an amorphous structure (including amicrocrystalline semiconductor film) may be used. In addition, acompound semiconductor film containing an amorphous structure, such asan amorphous silicon germanium film, may also be used. Further, the filmthickness may be made from 20 to 100 nm.

The amorphous silicon film is then crystallized by a known technique,forming a crystalline silicon film (also referred to as apolycrystalline silicon film or a polysilicon film) 202. Thermalcrystallization using an electric furnace, laser annealingcrystallization using a laser light, and lamp annealing crystallizationusing an infrared light as known crystallization methods.Crystallization is performed in this embodiment using an excimer laserlight, which uses XeCl gas.

Note that pulse emission excimer laser light formed into a linear shapeis used in this embodiment, but a rectangular shape may also be used.Continuous emission type argon laser light and continuous emission typeexcimer laser light can also be used.

In this Example, although the crystalline silicon film is used as theactive layer of the TFT, it is also possible to use an amorphous siliconfilm as the active layer.

Note that it is effective to form the active layer of a resettingtransistor, in which there is a necessity to reduce the off current, bythe amorphous silicon film, and to form the active layer of anamplifying transistor by the crystalline silicon film. Electric currentflows with difficulty in the amorphous silicon film because the carriermobility is low, and the off current does not easily flow. In otherwords, the most can be made of the advantages of both the amorphoussilicon film, through which current does not flow easily, and thecrystalline silicon film, through which current easily flows.

Next, as shown in FIG. 25B, a protective film 203 is formed on thecrystalline silicon film 202 with a silicon oxide film having athickness of 130 nm. This thickness may be chosen within the range of100 to 200 nm (preferably between 130 and 170 nm). Furthermore, anotherfilms such as insulating films containing silicon may also be used. Theprotective film 203 is formed so that the crystalline silicon film isnot directly exposed to plasma during addition of an impurity, and sothat it is possible to have delicate concentration control of theimpurity.

Resist masks 204 a, 204 b, and 204 c are then formed on the protectivefilm 203, and an impurity element, which imparts n-type conductivity(hereafter referred to as an n-type impurity element), is added throughthe protective film 203. Note that elements residing in periodic tablegroup 15 are generally used as the n-type impurity element, andtypically phosphorous or arsenic can be used. Note that a plasma dopingmethod is used, in which phosphine (PH₃) is plasma-excited withoutseparation of mass, and phosphorous is added at a concentration of1×10¹⁸ atoms/cm³ in this embodiment. An ion implantation method, inwhich separation of mass is performed, may also be used, of course.

The dose amount is regulated such that the n-type impurity element iscontained in n-type impurity regions (b) 205 a, 205 b thus formed bythis process, at a concentration of 2×10¹⁶ to 5×10¹⁹ atoms/cm³(typically between 5×10¹⁷ and 5×10¹⁸ atoms/cm³).

Next, as shown in FIG. 26C, the protective film 203 and the resist masks204 a, 204 b, and 204 c are removed, and an activation of the addedn-type impurity elements is performed. A known technique of activationmay be used as the means of activation, but activation is done in thisembodiment by irradiation of excimer laser light (laser annealing). Ofcourse, a pulse emission excimer laser and a continuous emission excimerlaser may be used, and it is not necessary to place any limits on theuse of excimer laser light. The goal is the activation of the addedimpurity element, and it is preferable that irradiation is performed atan energy level at which the crystalline silicon film does not melt.Note that the laser light irradiation may also be performed with theprotective film 203 in place.

The activation of impurity elements by heat treatment (furnaceannealing) may also be performed along with the activation of theimpurity element by laser light. When activation is performed by heattreatment, considering the heat resistance of the substrate, it is goodto perform heat treatment at about 450 to 550° C.

A boundary portion (connecting portion) with end portions of the n-typeimpurity regions (b) 205 a, 205 b, namely regions, in which the n-typeimpurity element is not added, on the periphery of the n-type impurityregions (b) 205 a, 205 b, is delineated by this process. This meansthat, at the point when the TFTs are later completed, extremely goodconnecting portion can be formed between LDD regions and channel formingregions.

Unnecessary portions of the crystalline silicon film are removed next,as shown in FIG. 25D, and island-shape semiconductor films (hereinafterreferred to as active layers) 206 to 210 are formed.

Then, as shown in FIG. 26A, a gate insulating film 211 is formed,covering the active layers 206 to 210. An insulating film containingsilicon and with a thickness of 10 to 200 nm, preferably between 50 and150 nm, may be used as the gate insulating film 211. A single layerstructure or a lamination structure may be used. A 110 nm thick siliconoxinitride film is used in this embodiment.

Thereafter, a conductive film having a thickness of 200 to 400 nm isformed and patterned to form gate electrodes 212 to 216. In Example 4,the gate electrodes and wirings (hereinafter referred to as gatewirings) electrically connected to the gate electrodes for providingconductive paths are formed of the same materials. Of course, the gateelectrode and the gate wiring may be formed of different materials fromeach other. More specifically, the gate wirings are made of a materialhaving a lower resistivity than the gate electrodes. This is because amaterial enabling fine processing is used for the gate electrodes, whilethe gate wirings are formed of a material that can provide a smallerwiring resistance but is not suitable for fine processing. The wiringresistance of the gate wiring can be made extremely small by using thistype of structure, and therefore a sensor unit having a large surfacearea can be formed. Namely, the above described pixel structure isextremely effective when an area sensor with a sensor unit having ascreen size of a 10 inch diagonal or larger (in addition, a 30 inch orlarger diagonal) is realized.

Although the gate electrode can be made of a single-layered conductivefilm, it is preferable to form a lamination film with two layers orthree layers, if necessary. Any known conductive films can be used for amaterial of the gate electrodes 212 to 216.

Typically, it is possible to use a film made of an element selected fromthe group consisting of aluminum (Al), tantalum (Ta), titanium (Ti),molybdenum (Mo), tungsten (W), chromium (Cr), and silicon (Si), a filmof nitride of the above element (typically a tantalum nitride film,tungsten nitride film, or titanium nitride film), an alloy film ofcombination of the above elements (typically Mo—W alloy or Mo—Ta alloy),or a silicide film of the above element (typically a tungsten silicidefilm or a titanium silicide film). Of course, the films may be used as asingle layer or a laminate layer.

In this embodiment, a laminate film of a tungsten nitride (WN) filmhaving a thickness of 30 nm and a tungsten (W) film having a thicknessof 370 nm is used. This may be formed by sputtering. When an inert gassuch as Xe or Ne is added as a sputtering gas, film peeling due tostress can be prevented.

The gate electrodes 213 and 216 are respectively formed at this time soas to overlap a portion of the n-type impurity regions (b) 205 a and 205b through the gate insulating film 211. This overlapping portion laterbecomes an LDD region overlapping the gate electrode.

Next, an n-type impurity element (phosphorous is used in thisembodiment) is added in a self-aligning manner with the gate electrodes212 to 216 as masks, as shown in FIG. 26B. The addition is regulatedsuch that phosphorous is added to n-type impurity regions (c) 217 to 224thus formed at a concentration of 1/10 to ½ that of the n-type impurityregions (b) 205 a and 205 b (typically between ¼ and ⅓). Specifically, aconcentration of 1×10¹⁶ to 5×10¹⁸ atoms/cm³ (typically 3×10¹⁷ to 3×10¹⁸atoms/cm³) is preferable.

Resist masks 225 a to 225 c are formed next, with a shape covering thegate electrodes 212, 214 and 215, as shown in FIG. 27C, and an n-typeimpurity element (phosphorous is used in this embodiment) is added,forming n-type impurity regions (a) 226 to 233 containing phosphorous athigh concentration. Ion doping using phosphine (PH₃) is also performedhere, and the phosphorous concentration of these regions is regulated soas to be set to from 1×10²⁰ to 1×10²¹ atoms/cm³ (typically between2×10²⁰ and 5×10²¹ atoms/cm³).

A source region or a drain region of the n-channel TFT is formed by thisprocess, and in the n-channel TFT, a portion of the n-type impurityregions 217, 218, 222, and 223 formed by the process of FIG. 26B isremained. These remaining regions correspond to LDD regions.

Next, as shown in FIG. 26D, the resist masks 225 a to 225 c are removed,and new resist masks 234 a and 234 b are formed. A p-type impurityelement (boron is used in this embodiment) is then added, forming p-typeimpurity regions 235 and 236 containing boron at high concentration.Boron is added here at a concentration of 3×10²⁰ to 3×10²¹ atoms/cm³(typically between 5×10²⁰ and 1×10²¹ atoms/cm³) by ion doping usingdiborane (B₂H₆)

Note that phosphorous has already been added to the impurity regions 235and 236 at a concentration of 1×10²⁰ to 1×10²¹ atoms/cm³, but boron isadded here at a concentration of at least 3 times or more that of thephosphorous. Therefore, the n-type impurity regions already formedcompletely invert to p-type, and function as p-type impurity regions.

Next, after removing the resist masks 234 a and 234 b, the n-type orp-type impurity elements added at respective concentrations areactivated. Furnace annealing, laser annealing or lamp annealing can beused as a means of activation. In this embodiment, heat treatment isperformed for 4 hours at 550° C. in a nitrogen atmosphere in an electricfurnace.

At this time, it is important to eliminate oxygen from the surroundingatmosphere as much as possible. This is because an exposed surface ofthe gate electrode is oxidized, which results in an increased resistanceif only a small amount of oxygen exists. Accordingly, the oxygenconcentration in the surrounding atmosphere for the above activationprocess is set at 1 ppm or less, preferably at 0.1 ppm or less.

A first interlayer insulating film 237 is formed next, as shown in FIG.27A. A single layer insulating film containing silicon is used as thefirst interlayer insulating film 237, or a lamination film combinedthere may be used. Further, a film thickness of between 400 nm and 1.5μm may be used. A lamination structure of a silicon oxide film having athickness of 800 nm on a silicon oxinitride film having a thickness of200 nm thick is used in this embodiment.

In addition, heat treatment is performed for 1 to 12 hours at 300 to450° C. in an atmosphere containing between 3 and 100% hydrogen,performing hydrogenation. In this process, dangling bands of thesemiconductor film are terminated by the thermally a excited hydrogen.Plasma hydrogenation (using hydrogen excited by plasma) may also beperformed as another means of hydrogenation.

Note that the hydrogenation processing may also be inserted during theformation of the first interlayer insulating film 237. Namely, hydrogenprocessing may be performed as above after forming the 200 nm thicksilicon oxinitride film, and then the remaining 800 nm thick siliconoxide film may be formed.

Next, a contact hole is formed in the gate insulating film 211 and thefirst interlayer insulating film 237, and source wirings 238 to 242 anddrain wirings 243 to 247 are formed. In this Example, this electrode ismade of a laminate film of three-layer structure in which a titaniumfilm having a thickness of 100 nm, an aluminum film containing titaniumand having a thickness of 300 nm, and a titanium film having a thicknessof 150 nm are continuously formed by sputtering. Of course, otherconductive films may be used.

A first passivation film 248 is formed next with a thickness of 50 to500 nm (typically between 200 and 300 nm) A 300 nm thick siliconoxinitride film is used as the first passivation film 248 in thisembodiment. This may also be substituted by a silicon nitride film. Notethat it is effective to perform plasma processing using a gas containinghydrogen such as H₂ or NH₃ before the formation of the siliconoxinitride film. Hydrogen activated by this preprocess is supplied tothe first interlayer insulating film 237, and the film quality of thefirst passivation film 248 is improved by performing heat treatment. Atthe same time, the hydrogen added to the first interlayer insulatingfilm 237 diffuses to the lower layer side, and the active layers can behydrogenated effectively.

Next, a second interlayer insulating film 249 made of organic resin isformed as shown in FIG. 27B. As the organic resin, it is possible to usepolyimide, polyamide, acryl, BCB (benzocyclobutene) or the like.Especially, since the second interlayer insulating film 249 is primarilyused for leveling, acryl excellent in leveling properties is preferable.In this embodiment, an acrylic film is formed to a thickness sufficientto level a stepped portion formed by TFTs. It is appropriate that thethickness is made 1 to 5 μm (more preferably, 2 to 4 μm).

Next, a contact hole is formed in the second interlayer insulating film249 and the first passivation film 248 so as to reach the drain wiring245, and a cathode electrode 250 of a photodiode is formed so as tocontact the drain wiring 245. In this embodiment, an aluminum filmformed by sputtering is used as the cathode electrode 250, but othermetals, for example titanium, tantalum, tungsten, and copper can also beused. Further, a lamination film made from titanium, aluminum, andtitanium may also be used.

Patterning is next performed after depositing an amorphous silicon filmcontaining hydrogen over the entire surface of the substrate, and aphotoelectric conversion layer 251 is formed. Then, a transparentconductive film is formed on the entire surface of the substrate. A 200nm thick ITO film is deposited by sputtering as the transparentconductive film in this embodiment. The transparent conductive film ispatterned, forming an anode electrode 252. (FIG. 27C.)

A Third Interlayer Insulating Film 253 is then Formed, as shown in FIG.28A. A level surface can be obtained by using a resin such as polyimide,polyamide, polyimide amide, or acrylic as the third interlayerinsulating film 253. A polyimide film having a thickness of 0.7 μm isformed over the entire surface of the substrate as the third interlayerinsulating film 253 in this embodiment.

A contact hole is next formed in the third interlayer insulating film253 so as to reach the anode electrode 252, and a sensor wiring 254 isformed. A 300 nm thick aluminum alloy film (an aluminum film comprisingtitanium of 1 wt %) is formed in this embodiment.

Thus, the sensor substrate is formed which has the structure as shown inFIG. 28B.

Reference numeral 270 shows an amplifying TFT, 271 shows a switchingTFT, 272 shows a resetting TFT, 273 shows a biasing TFT and 274 shows adischarge TFT.

In this embodiment, the amplifying TFT and the biasing TFT are n-channelTFTs, and at both source region sides and drain region sides of therespective TFTs, LDD regions 281 to 284 are respectively formed. Notethat the LDD regions 281 to 284 do not overlap with the gate electrodes212 and 215 through the gate insulating film 211. The above constructionmakes it possible to reduce a hot carrier injection in the amplifyingTFT 270 and the biasing TFT 273.

In this embodiment, the switching TFT 271 and the discharging TFT 274are n-channel TFTs, and at only respective drain region sides, LDDregions 283 and 286 are respectively formed. Note that the LDD regions283 and 286 overlap with the gate electrodes 213 and 216 through thegate insulating film 211.

The formation of the LDD regions 283 and 286 on only the drain regionside is in consideration of reducing the hot carrier injection and notcausing the operating speed to drop. Further, it is not necessary to betoo concerned with the value of the off current for the switching TFT271 and a discharging TFT 274, and more importance may be placed on theoperating speed. It is therefore preferable for the LDD regions 283 and286 to completely overlap with the gate electrodes 213 and 216, and toreduce resistive components as much as possible. Namely, the so-calledoffset should be eliminated. In particular, when the source signal linedrive circuit or the gate signal line driving circuit is driven at 15Vto 20V, the above constitution of the discharging TFT 274 of the thisembodiment is effective to reduce the hot carrier injection and also notto drop the operation speed.

Furthermore, in this embodiment, a resetting TFT 272 is p-channel TFTand has no LDD region. Degradation due to hot carrier injection isalmost of no concern for the p-channel TFTs, and therefore LDD regionsdo not have to be formed in particular. It is also possible, of course,to form an LDD region similar to that of an n-channel TFT and to takeaction against hot carriers. Further, the resetting TFT 272 may be ann-channel type TFT.

Further, by attaching a connector (flexible printed circuit, FPC) forconnecting terminals pulled around from the elements or the circuitsformed on the substrate with external signal terminals, the sensor iscompleted.

Note that it is possible to freely combine Embodiment 4 with Embodiments1 to 3.

Note that the present invention can be accomplished by using amono-crystal silicon substrate.

Embodiment 5

The sensor formed by implementing the present invention can be used invarious electronic apparatus. As such electronic apparatus of thepresent invention, there are pointed out a scanner, a digital stillcamera, an X-ray camera, a portable information terminal (a mobilecomputer, a portable telephone, a portable game machine), a note-typepersonal computer, a game machine, a television telephone and fingerprint read machine.

FIG. 29A shows a scanner 2901 using the close contact type sensor andincluding a sensor unit 2902. The scanner 2901 is arranged above areading object 2903. The close contact type sensor is fabricated byforming TFTs on a glass substrate. Since the close contact type sensordoes not use compact optical system, miniature machines can be achieved.As light for illuminating the reading object 2903, room light isutilized. Thereby, an exclusive light source is not needed. In thiscase, intensities of light change depending on imaging environment.Therefore, by applying the present invention, optimum storage period canbe found quickly. The present invention can be used in the sensor unit2902.

In FIG. 29B, in contrast to FIG. 29A, an exclusive light source 2907 isarranged. When positions of a reading region and a sensor unit 2905 arealigned, the light source 2907 is lifted thereabove. Further, positionsthereof are aligned by viewing a reading object 2906 via an irradiationwindow of the sensor unit 2905. In reading an image, the light source2907 and a scanner 2904 are overlapped and used. The present inventioncan be used in the sensor unit 2905.

FIG. 30A shows a portable information terminal 3001 including a liquidcrystal display 3002, a scanner 3003 using the close contact type sensorand a sensor unit 3004. When the scanner is used, as shown by asectional view of FIG. 30B, the liquid crystal display 3002 and thescanner 3003 are overlapped, the scanner 2901 is arranged above areading object 3005 and the liquid crystal display 3002 is arrangedthereabove. As irradiation light, light of the liquid crystal display3002 is utilized. Thereby, an exclusive light source is not needed. Thepresent invention can be used in the sensor unit 3004.

Here, in this embodiment, FIG. 31 shows a portable telephone including amain body 3101, a voice output portion 3102, a voice input portion 3103,a display device 3104, an operation switch 3105, an antenna 3106, and asensor unit 3107. The present invention can be applied to the sensorunit 3107. In the sensor unit, fingerprints can be read. Further, thepresent invention can be used for a sensor unit of a televisiontelephone.

By making the trial imaging operations with the different storageperiods for every pixels, according to the invention, the optimumstorage period can be determined for a short time. By setting thestorage period to the optimum value, moreover, the image can be read outhighly precisely.

1. A driving method of a MOS sensor having a plurality of pixels in animage pick up unit, comprising the steps of: imaging a first object ontrial by a process comprising the steps of: resetting said plurality ofpixels at a same time; and sequentially selecting at least a part ofsaid plurality of pixels to output signals of the selected pixels;determining a storage period in accordance with a period from the timeof said resetting to a time when the signal of the selected pixelssaturate; and imaging a second object by a process comprising the stepsof: resetting said plurality of pixels sequentially; and selecting saidplurality of pixels sequentially after said storage period has passedsince resetting said plurality of pixels sequentially.
 2. The methodaccording to claim 1 wherein a value of said storage period is set byirradiating said image pick up unit with light having a highestintensity among lights which have been reflected by an object to entersaid image pick up unit.
 3. The method according to claim 1 wherein thesignals are outputted exclusively from those of the plurality of pixelsof said image pick up unit that belong to a limited area.
 4. The methodaccording to claim 1 wherein the image of an object is picked up byusing said storage period.
 5. The method according to claim 1 whereinthe first object and the second object are the same.
 6. A driving methodof a MOS sensor having a plurality of pixels in an image pick up unit,comprising the steps of: imaging a first object on trial by a processcomprising the steps of: resetting said plurality of pixels at a sametime; and sequentially selecting a part of the plurality of pixels tooutput signals of the selected pixels; determining a storage period inaccordance with a period from the time of said resetting to a time whenone of the signals of the selected pixels saturates; and imaging asecond object by a process comprising the steps of: resetting saidplurality of pixels sequentially; and selecting said plurality of pixelssequentially after said storage period has passed since resetting saidplurality of pixels sequentially; wherein said one of the signals has alargest signal amplitude among the signals of the selected pixels. 7.The method according to claim 6 wherein a value of said storage periodis set by irradiating said image pick up unit with light having ahighest intensity among lights which have been reflected by an object toenter said image pick up unit.
 8. The method according to claim 6wherein the signals are outputted exclusively from those of theplurality of pixels of said image pick up unit that belong to a limitedarea.
 9. The method according to claim 6 wherein the image of an objectis picked up by using said storage period.
 10. The method according toclaim 6 wherein the first object and the second object are the same. 11.A driving method of a MOS sensor having a plurality of pixels in animage pick up unit wherein each of the plurality of pixels comprises aphotoelectric conversion element, the method comprising the steps of:imaging a first object on trial by a process comprising the steps of:resetting said plurality of pixels at a same time; and sequentiallyselecting the plurality of pixels to output signals of the selectedpixels; determining a storage period in accordance with a period fromthe time of said resetting to a time when photoelectric conversionelements of the selected pixels saturate; and imaging a second object bya process comprising the steps of: resetting said plurality of pixelssequentially; and selecting said plurality of pixels sequentially aftersaid storage period has passed since resetting said plurality of pixelssequentially.
 12. The method according to claim 11 wherein a value ofsaid storage period is set by irradiating said image pick up unit withlight having a highest intensity among lights which have been reflectedby an object to enter said image pick up unit.
 13. The method accordingto claim 11 wherein the signals are outputted exclusively from those ofthe plurality of pixels of said image pick up unit that belong to alimited area.
 14. The method according to claim 11 wherein the image ofan object is picked up by using said storage period.
 15. The methodaccording to claim 11 wherein the first object and the second object arethe same.
 16. A driving method of a MOS sensor having a plurality ofpixels in an image pick up unit wherein each of the plurality of pixelscomprises a photoelectric conversion element, the method comprising thesteps of: imaging a first object on trial by a process comprising thesteps of: resetting a part of said plurality of pixels at a same time;and sequentially selecting the plurality of pixels to output signals ofthe selected pixels; determining a storage period in accordance with aperiod from the time of said resetting to a time when any one ofphotoelectric conversion elements of the selected pixels saturates; andimaging a second object by a process comprising the steps of: resettingsaid plurality of pixels sequentially; and selecting said plurality ofpixels sequentially after said storage period has passed since resettingsaid plurality of pixels sequentially.
 17. The method according to claim16 wherein a value of said storage period is set by irradiating saidimage pick up unit with light having a highest intensity among lightswhich have been reflected by an object to enter said image pick up unit.18. The method according to claim 16 wherein the signals are outputtedexclusively from those of the plurality of pixels of said image pick upunit that belong to a limited area.
 19. The method according to claim 16wherein the image of an object is picked up by using said storageperiod.
 20. The method according to claim 16 wherein the first objectand the second object are the same.
 21. A driving method of a MOS sensorhaving a plurality of pixels in an image pick up unit, comprising thesteps of: imaging a first object on trial by a process comprising thesteps of: resetting said plurality of pixels at a same time; andsequentially selecting a part of said plurality of pixels to outputsignals of the selected pixels; determining a storage period inaccordance with a period from the time of said resetting to a time whenthe signal of the selected pixels saturates; and imaging a second objectby a process comprising the steps of: resetting said plurality of pixelssequentially; and selecting said plurality of pixels sequentially aftersaid storage period has passed since resetting said plurality of pixelssequentially.
 22. The method according to claim 21 wherein a value ofsaid storage period is set by irradiating said image pick up unit withlight having a highest intensity among lights which have been reflectedby an object to enter said image pick up unit.
 23. The method accordingto claim 21 wherein the signals are outputted exclusively from those ofthe plurality of pixels of said image pick up unit that belong to alimited area.
 24. The method according to claim 21 wherein the image ofan object is picked up by using said storage period.
 25. The methodaccording to claim 21 wherein the first object and the second object arethe same.